Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

被引：29

作者：

Gladkikh, T. ^{[1
]}

Kozlovskiy, A. ^{[1
,2
]}

Kenzhina, I. ^{[1
,2
]}

Dukenbayev, K. ^{[3
]}

Zdorovets, M. ^{[1
,2
,4
]}

机构：

[1] LN Gumilyov Eurasian Natl Univ, Astana, Kazakhstan

[2] Inst Nucl Phys Republ Kazakhstan, Astana, Kazakhstan

[3] Nazarbayev Univ, Sch Engn, Astana, Kazakhstan

[4] Ural Fed Univ, Ekaterinburg, Russia

来源：

VACUUM | 2019年 / 161卷

关键词：

Ceramic materials; Heavy ions; Hillocks; Crystal surface; Radiation defects; MECHANICAL-PROPERTIES; ALUMINUM NITRIDE; MICROSTRUCTURE; DAMAGE; SI; BOMBARDMENT; EVOLUTION; RADIATION; CERAMICS; COPPER;

D O I：

10.1016/j.vacuum.2018.12.026

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of irradiation with C2+ ions on changes in optical and structural properties of AlN-based ceramics has been studied. The choice of C2+ ions is due to the possibility of modeling defects formation in the surface layers, as well as the formation of carbide phases in the structure during irradiation. According to XRD data, the formation of an impurity phase characteristic of the Rhombohedral Al4C3 is observed in the structure of irradiated samples, the presence of which is due to the implantation of carbon ions into the surface layers of not more than 150 nm. The decrease in the intensity of the TSL spectrum for irradiated samples is due to the appearance of defects, as well as an increase in the concentration of impurity atoms. That leads to the substitution of Al and N atoms in the structure. At the irradiation dose of 10(15) ion/cm(2), there is a sharp increase in the absorption spectrum and the magnitude of the optical absorption.

引用

页码：103 / 110

页数：8

共 44 条

[1]

Atteshamuddin Sayyad, 2018, MECH ADV MATER STRUC, P1

[2] Comparison between AlN and Al2O3 ceramics applied to barrier dielectric of plasma actuator [J].