Excimer laser-induced surface fixation of polymer and its patterning

When ArF excimer laser pulses irradiated an UV-absorbing polymer film, such as poly(N, N-dimethylacrylamide) or polystyrene, in close contact with an optically transparent substrate, such as polyethylene or poly(vinyl alcohol), the target was selectively photolyzed, resulting in the formation of a crosslinked polymer which was covalently bonded onto the substrate surface. The formed polymer exhibited IR spectral features very similar to those of the target. Fine surface patterning of the formed polymer layer was attained by pulsed irradiation through projection mask. (C) 1996 American Institute of Physics.