Ultra-flat ITO films on mica for high temperature transparent flexible electrodes

被引：32

作者：

Bao, Si-Yao ^{[1
]}

Deng, Xing ^{[1
]}

Mao, Feng ^{[1
]}

Zhong, Ni ^{[1
,2
]}

Yue, Fang-Yu ^{[1
]}

Sun, Lin ^{[1
]}

Xiang, Ping-Hua ^{[1
,2
]}

Duan, Chun-Gang ^{[1
,2
]}

机构：

[1] East China Normal Univ, Dept Elect, Key Lab Polar Mat & Devices, Minist Educ, Shanghai 200241, Peoples R China

[2] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Peoples R China

来源：

CERAMICS INTERNATIONAL | 2020年 / 46卷 / 02期

基金：

中国国家自然科学基金;

关键词：

ITO; Mica; High temperature; Ultra-flat thin films; Transparent flexible electrodes; TIN OXIDE-FILMS; OPTICAL-PROPERTIES; INDIUM; HETEROEPITAXY; DISPLAY;

D O I：

10.1016/j.ceramint.2019.09.215

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Indium tin oxide (ITO) films were deposited on transparent and flexible mica substrates by RF magnetron sputtering at room temperature. The ITO films exhibit atomically flat morphology on the cleaved natural mica surface. Excellent thermal stability of mica allows heat treatment at high temperature up to 500 degrees C. The electronic and optical characteristics of the ITO films are improved by annealing process, which can be explained by the preferred (2 2 2)-oriented crystallization at temperatures higher than 200 degrees C. The resistivity of as-deposited amorphous ITO film is similar to 2.1 x 10(-3) Omega cm and remarkably decrease to similar to 5.0 x 10(-4) Omega cm for the annealed samples. Accompanying the rapid increase in the conductivity, the transmittance also increases to more than 90% for the crystallized ITO films. Furthermore, the mechanical tests indicate excellent flexibility and durability of the ITO films on mica. These results demonstrate that the ITO films on mica can endure high temperature process for the applications in flexible electronics.

引用

页码：2268 / 2272

页数：5

共 26 条

[1] Material alternative to ITO for transparent conductive electrode in flexible display and photovoltaic devices [J].