Numerical and experimental investigation on contactless resonant sensors

被引：31

作者：

Ando, B. ^{[1
]}

Baglio, S. ^{[1
]}

Bau, M. ^{[2
]}

Ferrari, V. ^{[2
]}

Sardini, E. ^{[2
]}

Savalli, N. ^{[1
]}

Serpelloni, M. ^{[2
]}

Trigona, C. ^{[1
]}

机构：

[1] Univ Catania, Dipartimento Ingn Elettr Elettron Sistemi DIEES, I-95125 Catania, Italy

[2] Univ Brescia, Dipartirnento Elettron Automaz, I-25123 Brescia, Italy

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2010年 / 162卷 / 02期

关键词：

Contactless MEMS; Crab-leg microresonator; BESOI technology; Numerical and experimental investigation;

D O I：

10.1016/j.sna.2010.04.009

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports numerical and experimental investigation on a (bulk and etch silicon on insulator) BESOI MEMS device. The implemented contactless actuation principle, exploits Lorentz forces exerted on a conductive-non magnetic surface of the sensor. These forces derive from the interaction between the eddy-currents and the radial magnetic field, both generated by a sinusoidally driven external inductor. Both excitation and readout strategies are performed remotely via a magnetic strategy. The sensor proposed here has been first analytically and numerically studied by using CoventorWare (TM) 2008, then the device prototype has been fabricated and a preliminary experimental campaign has been performed to characterize the system in terms of variation of its resonance frequency against changes in the sensor mass. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：329 / 335

页数：7

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