Absolute phase analysis method for three-dimensional surface profilometry using frequency-modulated grating

被引:14
作者
Ikeda, Y [1 ]
Yoneyama, S [1 ]
Fujigaki, M [1 ]
Morimoto, Y [1 ]
机构
[1] Wakayama Univ, Dept Optomechatron, Wakayama 6408510, Japan
基金
日本学术振兴会;
关键词
optical methods; shape measurement; grating projection; phase-stepping method; phase unwrapping; frequency modulation;
D O I
10.1117/1.1566780
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The authors propose a new high-speed and accurate phase analysis and subsequent phase unwrapping method for grating projection surface profilometry. In the proposed method, a special grating pattern is used for the projection. The light intensity distribution of this grating pattern has a form of a frequency modulated sinusoidal wave. In this grating pattern, two different phase distributions are included. The frequency modulated grating, which can be generated with an LCD projector or a film projector easily, is projected onto an object. Then, nine frames with phase stepping at a regular interval for a cycle are taken by a CCD camera. From these nine pictures, the two wrapped phase distributions are analyzed simultaneously. Then, using these phase distributions, phase unwrapping is carried out at each pixel independently. The 3-D profile of the object can be reconstructed using the absolute phase distribution. Since this method is suitable for high-speed shape measurement, applications to various inspections and 3-D surface digitizing are expected. (C) 2003 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码:1249 / 1256
页数:8
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