The high-efficient low-cost wheel-grinding technology for CVD diamond films

被引：5

作者：

Jin, Z. J. ^{[1
]}

Ma, X. W. ^{[1
]}

Yuan, Z. W. ^{[1
]}

机构：

[1] Dalian Univ Technol, Minist Educ, Key Lab Precis & Non Tradit Machining Technol, Dalian 116024, Peoples R China

来源：

PRECISION SURFACE FINISHING AND DEBURRING TECHNOLOGY | 2007年 / 24-25卷

关键词：

CVD diamond film; thermal-chemical polishing; wheel-grinding; graphitization;

D O I：

10.4028/www.scientific.net/AMR.24-25.295

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

CVD diamond films have been used in many high-tech fields with the industrial and scientific developments, while the lagging of the polishing technology for the CVD diamond films has limited their widely applications. This paper presents a high-efficient low-cost wheel-grinding technology for CVD diamond polishing, and the two key techniques of this technology are introduced in detail based on thermo-chemical polishing technology. Furthermore, wheel grinding technology exhibits a promising perspective for the widely application in the diamond films.

引用

页码：295 / 302

页数：8

共 3 条

[1] An efficient titanium-containing corundum wheel for grinding CVD diamond films
Xu, Hanqing
Zang, Jianbing
Yang, Guoping
Tian, Pengfei
Wang, Yanhui
Yu, Yiqing
Lu, Jing
Xu, Xipeng
Zhang, Pingwei
DIAMOND AND RELATED MATERIALS, 2018, 84 : 119 - 126
[2] An efficient super-high speed polishing method for CVD diamond films
Zhou, L.
Huang, S. T.
Xu, L. F.
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2011, 29 (06) : 698 - 704
[3] Diamond films by CVD, and high rate polishing at low temperature with partially molten Ce-Fe alloy
Li Junjie
Wang Shubin
Sun Yujing
Tian Shi
Zhang Yue
RARE METAL MATERIALS AND ENGINEERING, 2007, 36 (05) : 933 - 936

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