Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films

被引：10
|
作者：
Barua, D [1 ]
Gougousi, T [1 ]
Young, ED [1 ]
Parsons, GN [1 ]
机构：
[1] N Carolina State Univ, Raleigh, NC 27695 USA
来源：
APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 09期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.2181651
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Thin films of aluminum oxide and palladium were deposited on silicon at low temperatures (70-120 degrees C) by a cyclic adsorption/reaction processes using supercritical CO2 solvent. Precursors included Al(hfac)(3), Al(acac)(3), and Pd(hfac)(2), and aqueous H2O2, tert-butyl peracetate, and H-2 were used as the oxidants or reductants. For the precursors studied, growth proceeds through a multilayer precursor adsorption in each deposition cycle, and film thickness increased linearly with the number of growth cycles.
引用
收藏
页数：3
相关论文
共 50 条
  • [31] Environmental and Sustainability Analysis of a Supercritical Carbon Dioxide-Assisted Process for Pharmaceutical Applications
    Trucillo, Paolo
    Campardelli, Roberta
    De Marco, Iolanda
    PROCESSES, 2021, 9 (10)
  • [32] Polymer-assisted deposition of metal-oxide films
    Q. X. Jia
    T. M. McCleskey
    A. K. Burrell
    Y. Lin
    G. E. Collis
    H. Wang
    A. D. Q. Li
    S. R. Foltyn
    Nature Materials, 2004, 3 : 529 - 532
  • [33] Polymer Supermolecular Structures Built on Carbon Nanotubes via a Supercritical Carbon Dioxide-Assisted Route
    Zhang, Fan
    Xu, Qun
    Zhang, Hao
    Zhang, Zhiwei
    JOURNAL OF PHYSICAL CHEMISTRY C, 2009, 113 (43): : 18531 - 18535
  • [34] Polymer-assisted deposition of metal-oxide films
    Jia, QX
    Mccleskey, TM
    Burrell, AK
    Lin, Y
    Collis, GE
    Wang, H
    Li, ADQ
    Foltyn, SR
    NATURE MATERIALS, 2004, 3 (08) : 529 - 532
  • [35] Formation of insulator oxide films by acid catalyzed hydrolysis of metal alkoxides in supercritical fluid carbon dioxide
    Wang, Joanna S.
    Wai, Chien M.
    Brown, Gail J.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2014, 248
  • [36] Polymer Assisted Deposition (PAD) of thin metal films: A new technique to the preparation of metal oxides and reduced metal films
    Shukla, Piyush
    Lin, Yuan
    Minogue, Edel M.
    Burrell, Anthony K.
    McCleskey, T. Mark
    Jia, Quanxi
    Lu, Ping
    ACTINIDES 2005-BASIC SCIENCE, APPLICATIONS AND TECHNOLOGY, 2006, 893 : 183 - +
  • [37] Pulsed deposition of metal-oxide thin films using dual metal precursors
    Conley, JF
    Ono, Y
    Tweet, DJ
    Solanki, R
    APPLIED PHYSICS LETTERS, 2004, 84 (03) : 398 - 400
  • [38] Optimization of carbon dioxide-assisted nanoparticle deposition process with uncertain design space
    Casciato, Michael J.
    Kim, Sungil
    Lu, J. C.
    Hess, Dennis W.
    Grover, Martha A.
    11TH INTERNATIONAL SYMPOSIUM ON PROCESS SYSTEMS ENGINEERING, PTS A AND B, 2012, 31 : 1191 - 1195
  • [39] Supercritical carbon dioxide-assisted nanonization of dihydromyricetin for anticancer and bacterial biofilm inhibition efficacies
    Xu, Pei-Yao
    Fu, Chao-Ping
    Kankala, Ranjith Kumar
    Wang, Shi-Bin
    Chen, Ai-Zheng
    JOURNAL OF SUPERCRITICAL FLUIDS, 2020, 161
  • [40] Supercritical carbon dioxide-assisted synthesis of silver nano-particles in polyol process
    Chih, Yu-Wen
    Cheng, Wen-Tung
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2007, 145 (1-3): : 67 - 75
12345