Fabrication of hybrid sol-gel glass diffractive elements

Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional W-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.