A MEMS stage for 3-axis nanopositioning

被引：0

作者：

Liu, Xinyu ^{[1
]}

Kim, Keekyoung ^{[1
]}

Sun, Yu ^{[1
]}

机构：

[1] Univ Toronto, Adv Micro & Nanosyst Lab, Toronto, ON M5S 1A1, Canada

来源：

2007 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING, VOLS 1-3 | 2007年

关键词：

MEMS stage; 3-axis; nanopositioning; motion decoupling;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Applications in micro and nanotechnologies require millimeter-sized devices that are capable of 3-axis positioning with motion ranges of micrometers and resolutions of nanometers. This paper reports on the design, fabrication, and testing of a MEMS-based 3-axis positioning stage. In-plane and out-of-plane electrostatic actuators (comb-drive and parallel-plate) are employed for driving the stage to move independently along the XYZ directions, by +/- 12.5 mu m in the X and Y directions at an actuation voltage of 30V and by 3.5 mu m in the Z direction at 14.8V The structures are designed to achieve highly decoupled motions by effectively suppressing cross-axis motion coupling. Open-loop positioning repeatability is determined to be better than 17.3nm along all three axes.

引用

页码：561 / 566

页数：6

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