Tribological and Electrical Properties of Chromium-Doped Carbon Films Fabricated by Unbalanced Magnetron Sputtering for Medical Stents

被引:3
|
作者
Kang, Ki-Noh [1 ,2 ]
Lee, Jaehyeong [2 ]
Lee, Kang Yeon [3 ]
Park, Yong Seob [4 ]
机构
[1] Masan Univ, Dept Nursing, 2460 Hammadaero, Masanhoiwongu 51217, Chanwon Si, South Korea
[2] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 16419, South Korea
[3] Chosun Coll Sci & Technol, Dept Elect, Gwangju 61453, South Korea
[4] Chosun Coll Sci & Technol, Dept Elect, Gwangju 61453, South Korea
关键词
CrC; Unbalanced Magnetron Sputtering; Hardness; Surface Roughness; Resistivity; DIAMOND-LIKE CARBON; BIAS VOLTAGE; A-C; COATINGS; BIOCOMPATIBILITY; DEPOSITION; WEAR;
D O I
10.1166/jnn.2019.16201
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Chromium-doped carbon (Cr: C) films were fabricated by using unbalanced magnetron sputtering with chromium (Cr) and graphite (C) targets. We investigated the structural, tribological, and electrical properties of the Cr: C films fabricated with various target power densities. The surface of all the Cr: C films was smooth and uniform, and the cross section showed a more compact and clear columnar structure as the target power density increased. The root mean square surface roughness increased and the contact angle on the film surface increased with the increase in target power density. Furthermore, the hardness and elastic modulus of the Cr: C films showed improvements, while the resistivity decreased with the increase in target power density. These results are associated with the ion bombardment and resputtering owing to the effects of the applied target power density.
引用
收藏
页码:1415 / 1419
页数:5
相关论文
共 50 条
  • [31] Tribological analysis of nano-composite diamond-like carbon films deposited by unbalanced magnetron sputtering
    Chang, YY
    Wang, DY
    Chang, CH
    Wu, WT
    SURFACE & COATINGS TECHNOLOGY, 2004, 184 (2-3): : 349 - 355
  • [32] Tribological properties in a high vacuum of carbon films containing titanium prepared by magnetron sputtering
    Sasaki, M
    Kozukue, Y
    Hashimoto, K
    Takayama, K
    Nakamura, I
    Takano, I
    Sawada, Y
    VACUUM, 2004, 74 (3-4) : 455 - 459
  • [33] Microstructure and tribological properties of ZrMoN composite film fabricated by magnetron sputtering
    Xu, J.-H. (jhxu@just.edu.cn), 1600, Central South University, Lushan Nanlu, Changsha, 410043, China (19):
  • [34] Chromium-nanodiamond coatings obtained by magnetron sputtering and their tribological properties
    Atamanov, M. V.
    Khrushchov, M. M.
    Marchenko, E. A.
    Shevchenko, N. V.
    Levin, I. S.
    Petrzhik, M. I.
    Miroshnichenko, V. I.
    Relianu, M. D.
    24TH INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY, 2017, 872
  • [35] Characteristics of W-Doped Nanocrystalline Carbon Films Prepared by Pulsed DC Unbalanced Magnetron Sputtering
    Lee, Jaehyeong
    Hwang, Sung Hwan
    Hwang, Soohyun
    Park, Yong Seob
    SCIENCE OF ADVANCED MATERIALS, 2017, 9 (06) : 984 - 987
  • [36] Tribological and electrical properties of nanocrystalline Cu films deposited by DC magnetron sputtering with varying temperature
    Geetha, M.
    Kumar, N.
    Panda, K.
    Dhara, S.
    Dash, S.
    Panigrahi, B. K.
    Tyagi, A. K.
    Jayavel, R.
    Kamaraj, V.
    TRIBOLOGY INTERNATIONAL, 2013, 58 : 79 - 84
  • [37] Characteristics of titanium-doped diamond-like carbon films deposited by unbalanced magnetron sputtering
    Nie, Chao-Yin
    Xie, Hong-Mei
    Yang, Juan
    Chen, Zhi-Qian
    Cailiao Rechuli Xuebao/Transactions of Materials and Heat Treatment, 2008, 29 (03): : 147 - 151
  • [38] Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering
    Myung, HS
    Park, YS
    Jung, MJ
    Hong, B
    Han, JG
    MATERIALS LETTERS, 2004, 58 (09) : 1513 - 1516
  • [39] Study on nitrogenated amorphous carbon films prepared by unbalanced magnetron sputtering
    Shi, JR
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (03)
  • [40] Study on the microstructure and properties of graphite-like carbon films deposited by unbalanced magnetron sputtering
    Wang, Yongjun
    Li, Hongxuan
    Ji, Li
    Zhao, Fei
    Li, Jian
    Liu, Xiaohong
    Wu, Yanxia
    Lv, Yanhong
    Fu, Yingying
    Zhou, Huidi
    Chen, Jianmin
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY, 2012, 226 (J8) : 714 - 721