共 50 条
- [23] Study on properties and preparation of films by Unbalanced Magnetron Sputtering FRONTIERS OF MECHANICAL ENGINEERING AND MATERIALS ENGINEERING, PTS 1 AND 2, 2012, 184-185 : 1497 - 1500
- [24] Thermal stability and tribological properties of CrZr-Si-N films synthesized by closed field unbalanced magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (04): : 867 - 872
- [25] Deposition of chromium-carbon films by magnetron sputtering of chromium and carbon targets MODERN PHYSICS LETTERS B, 2005, 19 (21): : 1039 - 1050
- [26] ELECTRICAL PROPERTIES OF Cr/CrN NANO-MULTILAYERS PRODUCED BY THE UNBALANCED MAGNETRON SPUTTERING TECHNIQUE DYNA-COLOMBIA, 2011, 78 (168): : 53 - 57
- [29] Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering SURFACE & COATINGS TECHNOLOGY, 2010, 205 (03): : 793 - 800