共 50 条
- [13] Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (05): : 1975 - 1979
- [16] Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research, 2004, 18 (02): : 171 - 175
- [18] Tribological properties of graphite-like carbon coating prepared by unbalanced magnetron sputtering method Mocaxue Xuebao/Tribology, 2003, 23 (06): : 463 - 467
- [19] Study on properties and preparation of films by Unbalanced Magnetron Sputtering FRONTIERS OF MECHANICAL ENGINEERING AND MATERIALS ENGINEERING, PTS 1 AND 2, 2012, 184-185 : 1497 - 1500
- [20] Tribological properties of amorphous carbon thin films grown by magnetron sputtering method SURFACE & COATINGS TECHNOLOGY, 2004, 180 : 218 - 221