Tribological and Electrical Properties of Chromium-Doped Carbon Films Fabricated by Unbalanced Magnetron Sputtering for Medical Stents

被引：3

作者：

Kang, Ki-Noh ^{[1
,2
]}

Lee, Jaehyeong ^{[2
]}

Lee, Kang Yeon ^{[3
]}

Park, Yong Seob ^{[4
]}

机构：

[1] Masan Univ, Dept Nursing, 2460 Hammadaero, Masanhoiwongu 51217, Chanwon Si, South Korea

[2] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 16419, South Korea

[3] Chosun Coll Sci & Technol, Dept Elect, Gwangju 61453, South Korea

[4] Chosun Coll Sci & Technol, Dept Elect, Gwangju 61453, South Korea

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2019年 / 19卷 / 03期

关键词：

CrC; Unbalanced Magnetron Sputtering; Hardness; Surface Roughness; Resistivity; DIAMOND-LIKE CARBON; BIAS VOLTAGE; A-C; COATINGS; BIOCOMPATIBILITY; DEPOSITION; WEAR;

D O I：

10.1166/jnn.2019.16201

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Chromium-doped carbon (Cr: C) films were fabricated by using unbalanced magnetron sputtering with chromium (Cr) and graphite (C) targets. We investigated the structural, tribological, and electrical properties of the Cr: C films fabricated with various target power densities. The surface of all the Cr: C films was smooth and uniform, and the cross section showed a more compact and clear columnar structure as the target power density increased. The root mean square surface roughness increased and the contact angle on the film surface increased with the increase in target power density. Furthermore, the hardness and elastic modulus of the Cr: C films showed improvements, while the resistivity decreased with the increase in target power density. These results are associated with the ion bombardment and resputtering owing to the effects of the applied target power density.

引用

页码：1415 / 1419

页数：5

共 23 条

[1]

Allen M, 2001, J BIOMED MATER RES, V58, P319, DOI 10.1002/1097-4636(2001)58:3<319::AID-JBM1024>3.3.CO

[2]

2-6

[3]

Anderson J.M., 1994, PROBL GEN SURG, V11, P147

[4] Deposition and some properties of nanocrystalline WC and nanocomposite WC/a-C:H coatings [J].

Czyzniewski, A .

THIN SOLID FILMS, 2003, 433 (1-2) :180-185

[5]

Dearnaley G., 1993, Clinical Materials, V12, P237, DOI 10.1016/0267-6605(93)90078-L

[6] Tribology of diamondlike carbon and related materials: an updated review [J].

Grill, A .

SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :507-513

[7] The Effect of Pulse DC and DC Substrate Bias during In Situ Cleaning PVD Process on Surface Roughness [J].

Hanizam ;

Soufhwee, H. ;

Anuar, K. ;

Nizam, A. R. Md ;

Mohamad, N. .

MALAYSIAN TECHNICAL UNIVERSITIES CONFERENCE ON ENGINEERING & TECHNOLOGY 2012 (MUCET 2012), 2013, 53 :562-568

[8] Influence of the bias voltage on the structure and the tribological performance of nanoscale multilayer C/Cr PVD coatings [J].

Kok, YN ;

Hovsepian, PE ;

Luo, Q ;

Lewis, DB ;

Wen, JG ;

Petrov, I .

THIN SOLID FILMS, 2005, 475 (1-2) :219-226

[9] Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering [J].

Kulikovsky, V ;

Bohac, P ;

Franc, F ;

Deineka, A ;

Vorlicek, V ;

Jastrabik, L .

[10] Diamond-like carbon - present status [J].

Lifshitz, Y .

← 1 2 3 →