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- [3] Nano force sensing using symmetric double stage micro resonator [J]. MEASUREMENT, 2014, 58 : 215 - 220
- [6] Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2019, 25 (07): : 2767 - 2782