An integrated Silicon Drift Detector System for FEI Schottky Field Emission Transmission Electron Microscopes

被引：48

作者：

von Harrach, H. S. ^{[1
]}

Dona, P. ^{[1
]}

Freitag, B. ^{[1
]}

Soltau, H. ^{[2
]}

Niculae, A. ^{[2
]}

Rohde, M. ^{[3
]}

机构：

[1] FEI Co, NL-5600 KA Eindhoven, Netherlands

[2] PN Sensor GmbH, D-81739 Munich, Germany

[3] Bruker AXS Microanal GmbH, D-12489 Berlin, Germany

来源：

MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷

关键词：

D O I：

10.1017/S1431927609094288

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：208 / 209

页数：2

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[3] PRECISION AND SENSITIVITY IN ELECTRON MICROPROBE ANALYSIS [J].

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