Plasma activated pulsed laser deposition for synthesis of particle-free La2-xSrxCuO4 films

被引：3

作者：

Yin, HQ ^{[1
]}

Ueda, Y ^{[1
]}

Arakawa, T ^{[1
]}

Kaneda, Y ^{[1
]}

Yoshikawa, T ^{[1
]}

Haneji, N ^{[1
]}

Sugahara, M ^{[1
]}

机构：

[1] Yokohama Natl Univ, Fac Engn, Dept Elect & Comp Engn, Yokohama, Kanagawa 240, Japan

来源：

THIN SOLID FILMS | 1999年 / 338卷 / 1-2期

关键词：

laser ablation; plasma processing and deposition; superconductivity; surface morphology;

D O I：

10.1016/S0040-6090(98)00889-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report a new pulsed laser deposition technique named radio frequency (RF) plasma activated pulsed laser deposition. La2-xSrxCuO4 (x = 0.15) films were deposited by this method, The results of scanning electronic microscopy and atomic force microscopy observations show that particles and droplets that are usually induced by means of a normal pulsed laser deposition method are effectively reduced. Moreover, stable superconductive La2-xSrxCuO4 films can be obtained at conditions of substrate temperature 650 degrees C and at oxygen gas pressure 6.6 Pa, Based on the RF plasma process knowledge, a qualitative analysis is given to explain the observed experimental results. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：20 / 23

页数：4

共 24 条

[1] Growth of single unit-cell superconducting La2-xSrxCuO4 films
Rüfenacht, A
Chappatte, P
Gariglio, S
Leemann, C
Fompeyrine, J
Locquet, JP
Martinoli, P
SOLID-STATE ELECTRONICS, 2003, 47 (12) : 2167 - 2170
[2] Scaling between Superfluid Density and Tc in Overdoped La2-xSrxCuO4 Films
de Mello, Evandro V. L.
CONDENSED MATTER, 2019, 4 (02): : 1 - 8
[3] Stabilization of Sr-rich ultrathin epitaxial films of La2-xSrxCuO4
Johnson, Alyssa M.
Burquest, Franklin J.
Larsen, Hannah M.
Prill, Nicholas
Nelson-Cheeseman, Brittany B.
THIN SOLID FILMS, 2018, 649 : 167 - 170
[4] Application of spark plasma sintering to the manufacture of La2-xSrxCuO4 superconducting ceramics
Wan, Bo
Insinga, Andrea Roberto
Dash, Apurv
Grivel, Jean-Claude
CERAMICS INTERNATIONAL, 2024, 50 (23) : 51421 - 51428
[5] Preparation of epitaxial La2-xSrxCuO4 thin films for dynamic investigations of epitaxial strain
Trommler, S.
Pahlke, P.
Huehne, R.
Schultz, L.
Holzapfel, B.
9TH EUROPEAN CONFERENCE ON APPLIED SUPERCONDUCTIVITY (EUCAS 09), 2010, 234
[6] Strong Metasurface-Josephson Plasma Resonance Coupling in Superconducting La2-xSrxCuO4
Schalch, Jacob S.
Post, Kirk
Duan, Guangwu
Zhao, Xiaoguang
Kim, Young Duck
Hone, James
Fogler, Michael M.
Zhang, Xin
Basov, Dmitri N.
Averitt, Richard D.
ADVANCED OPTICAL MATERIALS, 2019, 7 (21)
[7] Anisotropic resistivity of In-plane-aligned La2-xSrxCuO4(100) films on LaSrGaO4(100) substrates
Myoren, H
Bergs, R
Tachiki, T
Chen, J
Nakajima, K
Suzuki, M
Yamashita, T
Sato, H
Naito, M
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (5A): : 2642 - 2645
[8] Current-voltage characteristics of strained, highly underdoped La2-xSrxCuO4 thin films
Zajcewa, I
Chrobak, M.
Mackosz, K.
Jurczyszyn, M.
Minikayev, R.
Abaloszew, A.
Cieplak, Marta Z.
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2022, 35 (01)
[9] Suppression of Precipitates in the La2-xSrxCuO4 Films Grown on LaSrAlO4 Substrates by Introducing Homoepitaxial Layer
Li, Bing-Sheng
Sawa, Akihito
Okamoto, Hiroshi
JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (09)
[10] Synthesis of (Ba,Sr)TiO3 thin films by plasma-activated pulsed laser deposition technique
Arakawa, T
Arai, N
Yin, HQ
Kaneda, H
Sugahara, M
Haneji, N
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5A): : 2869 - 2873

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