Effect of residual water vapor on the performance of indium tin oxide film and silicon heterojunction solar cell

被引：12
作者：
Wang, Jianqiang [1 ]
Meng, Chuncai [2 ]
Zhao, Lei [3 ,4 ,5 ]
Wang, Wenjing [3 ,4 ,5 ]
Xu, Xixiang [2 ]
Zhang, Yongzhe [1 ]
Yan, Hui [1 ]
机构：
[1] Beijing Univ Technol, Coll Mat Sci & Engn, Key Lab Adv Funct Mat, Beijing Key Lab Microstruct & Property Adv Mat,Ed, Beijing 100124, Peoples R China
[2] Chengdu Zhufeng Yongming Technol Co Ltd, Chengdu 610200, Sichuan, Peoples R China
[3] Chinese Acad Sci, Inst Elect Engn, Key Lab Solar Thermal Energy & Photovolta Syst, Beijing 100190, Peoples R China
[4] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[5] Dalian Natl Lab Clean Energy, Dalian 116023, Peoples R China
来源：
SOLAR ENERGY | 2020年 / 204卷
基金：
中国国家自然科学基金;
关键词：
Silicon heterojunction solar cell; Indium tin oxide; Interfacial contact; HYDROGEN-DOPED IN2O3; TRANSPARENT; MICROSTRUCTURES; TEMPERATURE; EFFICIENCY;
D O I：
10.1016/j.solener.2020.04.086
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
In this study, we investigate the effect of residual H2O pressure (P-H2O) on the structural, electrical, and optical properties of indium tin oxide (ITO) film and the current-voltage (I-V) performance of silicon heterojunction (SHJ) solar cells. The ITO films and SHJ solar cell were prepared under different P-H2O (3.75 x 10(-7) Pa, 6 x 10(-7) Pa, 10.25 x 10(-7) Pa) by varying the pumping time before starting the fabrication process. The experimental results revealed the crystallinity of ITO films was suppressed with the increase in P-H2O. Further, the sheet resistance of ITO films was reduced from 103 O/sq to 60 O/sq due to the enhanced carrier mobility, and the transmittance in near-infrared (NIR) region exhibited a slight increase, but the conversion efficiency of SHJ solar cells dropped dramatically from 23.3% to 22.79% due to the degradation of fill factor (FF). The analysis on n-a-Si:H/ITO and ITO/Ag contact properties indicated that such FF degradation could be attributed to the increased specific contact resistance for the two contacts, when P-H2O was high. Finally, SHJ solar cell with conversion efficiency of 23.53% was achieved by restraining the residual H2O vapor during ITO deposition along with the optimization of transmittance in NIR region by adjusting the amount of O-2 flow.
引用
收藏
页码：720 / 725
页数：6
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