NO2 gas sensor made of porous MoO3 sputtered films

被引：10

作者：

Yamazaki, T ^{[1
]}

Jin, CJ ^{[1
]}

Nakayama, A ^{[1
]}

Ito, K ^{[1
]}

Yoshizawa, T ^{[1
]}

Kikuta, T ^{[1
]}

Nakatani, N ^{[1
]}

Yamabuchi, T ^{[1
]}

机构：

[1] Toyama Univ, Fac Engn, Toyama 9308555, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 1B期

关键词：

molybdenum trioxide; sputtering; porous film; NO2; gas sensor;

D O I：

10.1143/JJAP.44.792

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Molybdenum trioxide films were sputter-deposited on quartz substrates at various substrate temperatures and discharge gas pressures. The films were annealed in air at 450 degrees C. Scanning electron microscopy showed that fine flakes were formed in the films deposited at 300 degrees C, while the surface of the films deposited at room temperature was smooth. After annealing, the fine flakes in the former films grew, while in the latter films, a layered structure was formed. X-ray diffraction patterns showed that every film was composed of orthorhombic MoO3 crystallites. The highest sensitivity and the fastest response to NO2 gas were observed in a film with a layered structure, which was deposited at room temperature and a high pressure of 11 Pa. This film was found to be porous and to have a density of 2.8 g/cm(3), which is Much lower than the bulk density of 4.7 g/cm(3).

引用

页码：792 / 795

页数：4

共 25 条

[1] TUNGSTEN OXIDE-BASED SEMICONDUCTOR SENSOR HIGHLY SENSITIVE TO NO AND NO2
AKIYAMA, M
TAMAKI, J
MIURA, N
YAMAZOE, N
[J]. CHEMISTRY LETTERS, 1991, (09) : 1611 - 1614
[2] NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporation
Cantalini, C
Sun, HT
Faccio, M
Pelino, M
Santucci, S
Lozzi, L
Passacantando, M
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) : 81 - 87
[3] Thin film tin oxide-based propane gas sensors
Carbajal-Franco, G
Tiburcio-Silver, A
Domínguez, JM
Sánchez-Juárez, A
[J]. THIN SOLID FILMS, 2000, 373 (1-2) : 141 - 144
[4] Carbon monoxide response of molybdenum oxide thin films deposited by different techniques
Comini, E
Faglia, G
Sberveglieri, G
Cantalini, C
Passacantando, M
Santucci, S
Li, Y
Wlodarski, W
Qu, W
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) : 168 - 174
[5] PROPERTIES OF REACTIVELY SPUTTERED TIN OXIDE-FILMS AS CO GAS SENSORS
DIGIULIO, M
MICOCCI, G
RELLA, R
SICILIANO, P
TEPORE, A
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) : 193 - 195
[6] Influence of the nanostructural characteristics on the gas sensing properties of pulsed laser deposited tin oxide thin films
Dolbec, R
El Khakani, MA
Serventi, AM
Saint-Jacques, RG
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3): : 566 - 571
[7] MoO3-based sputtered thin films for fast NO2 detection
Ferroni, M
Guidi, V
Martinelli, G
Sacerdoti, M
Nelli, P
Sberveglieri, G
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) : 285 - 288
[8] Characterization of activated reactive evaporated MoO3 thin films for gas sensor applications
Hussain, OM
Rao, KS
[J]. MATERIALS CHEMISTRY AND PHYSICS, 2003, 80 (03) : 638 - 646
[9] A new preparation method for sputtered MoO3 multilayers for the application in gas sensors
Imawan, C
Steffes, H
Solzbacher, F
Obermeier, E
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) : 119 - 125
[10] Low temperature NO2 sensitivity of nano-particulate SnO2 film for work function sensors
Karthigeyan, A
Gupta, RP
Scharnagl, K
Burgmair, M
Zimmer, M
Sharma, SK
Eisele, I
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) : 69 - 72

← 1 2 3 →