A Low-Temperature Alumina/Copper Diffusion Bonding Process using La-Doped Titanium Interlayers

被引:5
|
作者
Su, Cherng-Yuh [1 ,2 ,3 ]
Huang, Jia-Liang [2 ]
Chen, Po-Chun [4 ]
Yu, Hsin-Jung [3 ]
Ma, Dai-Liang [5 ]
Yu, Bang-Ying [5 ]
机构
[1] Natl Taipei Univ Technol, Addit Mfg Ctr Mass Customizat Prod, Taipei 10608, Taiwan
[2] Natl Taipei Univ Technol, Dept Mech Engn, Taipei 106, Taiwan
[3] Natl Taipei Univ Technol, Inst Mfg Technol, Taipei 106, Taiwan
[4] Natl Taipei Univ Technol, Dept Mat & Mineral Resources Engn, Taipei 106, Taiwan
[5] Natl Chung Shan Inst Sci & Technol, Mat & Electroopt Res Div, Taoyuan 32599, Taiwan
来源
COATINGS | 2018年 / 8卷 / 11期
关键词
alumina/copper heterojunction; low-temperature diffusion bonding; thin-film pre-metallization; MECHANICAL-PROPERTIES; COPPER; METAL; CU; MICROSTRUCTURES; GROWTH; AL;
D O I
10.3390/coatings8110401
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ceramic-to-metal heterojunctions have been established to improve high-temperature stability for applications in aerospace and harsh environments. In this work, we employed low-temperature diffusion bonding to realize an alumina/Cu heterogeneous joint. Using a thin layer of lanthanum-doped titanium (La-doped Ti) to metallize the alumina surface, we achieved the bonding at a temperature range of 250-350 degrees C. We produced a uniform, thermally stable, and high-strength alumina/Cu joint after a hot-press process in vacuum. Signals from X-ray diffraction (XRD) suggested the successful diffusion of Ti and La into the alumina substrate, as Ti can easily substitute Al in alumina, and La has a better oxygen affinity than that of Al. The transmission electron microscopy and XRD results also showed the existence of CuxTiyO phases without CuxTiy or LaOx . In addition, the bonding strength of alumina/copper hot-pressed at 250, 300, and 350 degrees C were 7.5, 9.8 and 15.0 MPa, respectively. The process developed in this study successfully lowered the bonding temperature for the alumina/copper joint.
引用
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页数:10
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