Molecular-dynamics simulations of sputtering

被引：11

作者：

Smith, R ^{[1
]}

Kenny, SD ^{[1
]}

Ramasawmy, D ^{[1
]}

机构：

[1] Loughborough Univ Technol, Dept Math Sci, Loughborough LE11 3TU, Leics, England

来源：

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2004年 / 362卷 / 1814期

关键词：

molecular dynamics; computer simulation; sputtering; ionic potentials; collision cascades;

D O I：

10.1098/rsta.2003.1308

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

The use of molecular-dynamics simulations to understand the ejection processes of particles from surfaces after energetic ion bombardment is discussed. Substrates considered include metals, covalent and ionic materials, polymers and molecular solids. It is shown how the simulations can be used to aid interpretation of experimental results by providing the underlying mechanisms behind the ejection processes.

引用

页码：157 / 176

页数：20

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