共 50 条
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MEMS-based Fabrication of Multiple-Degree-of-Freedom Ionic Polymer-Metal Composite Actuators
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ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2010,
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[43]
Performance of MEMS-based gas distribution and control systems for semiconductor processing
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MICROMACHINED DEVICES AND COMPONENTS IV,
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Development of a Test Rig for MEMS-Based Gyroscopic Motion Sensors in Human Applications
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15TH NORDIC-BALTIC CONFERENCE ON BIOMEDICAL ENGINEERING AND MEDICAL PHYSICS (NBC 2011),
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Design of a MEMS-Based Piezoelectric Vibration Energy Harvesting Device for Automotive Applications
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COMPUTACION Y SISTEMAS,
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:71-79