Bidirectional Electrothermal Actuator With Z-Shaped Beams

被引：37

作者：

Zhu, Yong ^{[1
]}

Moheimani, S. O. Reza ^{[2
]}

Yuce, Mehmet Rasit ^{[3
]}

机构：

[1] Griffith Univ, Sch Engn, Gold Coast 4222, Australia

[2] Univ Newcastle, Sch Elect Engn & Comp Sci, Newcastle, NSW 2308, Australia

[3] Monash Univ, Dept Elect & Comp Syst Engn, Clayton, Vic 3800, Australia

来源：

IEEE SENSORS JOURNAL | 2012年 / 12卷 / 07期

基金：

澳大利亚研究理事会;

关键词：

Bidirectional motion; electrothermal actuator; microsystem design;

D O I：

10.1109/JSEN.2012.2194141

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A bidirectional micro-actuator powered by electrothermal force is successfully demonstrated under both dc and ac operations, without the assistance of magnetic field, using MetalMUMPs process. To achieve small stiffness without buckling, which tends to occur in V-shaped actuators, a new Z-shaped electrothermal actuator is designed. With the actuation current from -13 mA to +13 mA, the electrothermal actuator can achieve a bidirectional motion in a dynamic range from -11.6 mu m to +12.8 mu m. Experimentally obtained frequency response of the actuator indicates that it has a bandwidth of 49 Hz.

引用

页码：2508 / 2509

页数：2