Fiber self-mixing interferometer with orthogonally polarized light compensation

被引：14

作者：

Zhang, Shaohui ^{[1
]}

Zhang, Shulian ^{[1
]}

Sun, Liqun ^{[1
]}

Tan, Yidong ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 23期

基金：

中国国家自然科学基金;

关键词：

SOLID-STATE LASER; FEEDBACK INTERFEROMETRY; INTERFERENCE;

D O I：

10.1364/OE.24.026558

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A fiber heterodyne self-mixing interferometer with orthogonally polarized light compensation is achieved. This system can adapt to various complex scenes while still keeping ultra-high sensitivity and anti-disturbance capability. Ultra-high sensitivity microchip laser is used as the laser source and polarization maintaining(PM) fiber makes the light path easy to accommodate to complex spaces, such as remote or narrow and small space. Besides, orthogonally polarized light inside PM fiber can eliminate the measurement error on account of environment disturbance. At present, the displacement resolution could be less than 10nm, which shows a great potential in nano-metrology. (C) 2016 Optical Society of America

引用

页码：26558 / 26564

页数：7

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