Homogeneity of Langasite and Langatate wafers for acoustic wave applications

被引：0

作者：

Fachberger, R ^{[1
]}

Riha, E ^{[1
]}

Born, E ^{[1
]}

Pongratz, P ^{[1
]}

机构：

[1] Vienna Univ Technol, Vienna, Austria

来源：

2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Variations in the concentration of the chemical constituents of Langasite (La3Ga5SiO14) and its homeotype Langatate (La3Ta05Ga5.5O14) have been found by the means of X-ray methods and selective crystal etching. To determine their influence on the acoustic properties SAW resonators have been designed and processed: on 3" wafers from Langasite and Langatate crystal boules of different suppliers. Compositional changes on a short range scale according to growth striations and on a long range scale as well could be distinguished leading to variations of the SAW velocity up to 1000 ppm within a wafer. If a device covers several growth striations a superposition of different propagation characteristics occurs leading to a multimode behavior and thereby degrading the effective Q-value of the SAW resonators. Wafers from recently grown boules, however, reveal frequency shifts with a standard deviation of 50 ppm only and maximum Q-values of up to 15000, thus demonstrating the progress in crystal growing.

引用

页码：100 / 109

页数：10

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