MEMS Electrostatic Energy Harvesting Device with Spray Coated Electret

被引：0

作者：

Luo, Anxin ^{[1
]}

Xu, Yixin ^{[1
]}

Chen, Siyan ^{[1
]}

Dong, Hanning ^{[1
]}

Zhang, Yulong ^{[1
,2
]}

Wang, Fei ^{[1
,2
]}

机构：

[1] Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, Peoples R China

[2] Shenzhen Key Lab 3rd Generat Semicond Devices, Shenzhen, Peoples R China

来源：

2017 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2017年

基金：

中国国家自然科学基金;

关键词：

Electret; energy harvesting; stability; spray coating;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 1318 mm(2). With the matched resistance of 21 M Omega, an output power of 12 mu W is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s(2). The thermal stability of this device is tested on 100 degrees C, decent power can be output after 34 hours.

引用

页码：134 / 137

页数：4

共 22 条

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