A measurement system for the determination of material properties of microcomponents on the basis of digital holography

被引：2
|
作者：
Osten, W [1 ]
Seebacher, S [1 ]
Baumbach, T [1 ]
Jüptner, W [1 ]
机构：
[1] BIAS, D-28359 Bremen, Germany
来源：
TECHNISCHES MESSEN | 2001年 / 68卷 / 02期
关键词：
Elastic moduli - Holography;
D O I：
10.1524/teme.2001.68.2.80
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This contribution describes a new measurement system based on digital holography which was developed to fulfill the special demands of the determination of material parameters of microsystem components. From a combined interferometrical shape and deformation analysis several parameters of interest like Poisson-ratio, Young's modulus or the thermal expansion coefficients of micro-beams are derived.
引用
收藏
页码：80 / 85
页数：6
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