Perpendicular magnetic anisotropy of Mn4N films fabricated by reactive sputtering method

被引：55

作者：

Kabara, Kazuki ^{[1
]}

Tsunoda, Masakiyo ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Elect Engn, Sendai, Miyagi 9808579, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2015年 / 117卷 / 17期

基金：

日本学术振兴会;

关键词：

NITROGEN;

D O I：

10.1063/1.4913730

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Manganese nitride films were fabricated on MgO substrates by changing N-2 flow ratio into Ar gas (P-N2) during reactive sputtering deposition of the films, and their crystal structures and magnetic properties were investigated. Single phased epsilon-Mn4N films were obtained when P-N2 was 5%-9%, and the tetragonal lattice distortion was identified in all the Mn4N films (the lattice constant ratio, c/a = 0.99). Perpendicular magnetic anisotropy was observed in all the specimens. The Mn4N film, fabricated with P-N2 = 8%, has a low saturation magnetization (M-s = 110 emu/cc) and relatively high magnetic anisotropic energy (K-u = 8.8 x 10(5) erg/cc). Both M-s and K-u of the films drastically changed with mixing other phases (alpha-Mn, beta-Mn, eta-Mn3N2, and possibly gamma-Mn) by varying P-N2. (c) 2015 AIP Publishing LLC.

引用

页数：4

共 25 条

[1] AMORPHOUS METALLIC FILMS FOR MAGNETO-OPTIC APPLICATIONS [J].

CHAUDHARI, P ;

CUOMO, JJ ;

GAMBINO, RJ .

APPLIED PHYSICS LETTERS, 1973, 22 (07) :337-339

[2] Effect of substrate-film interface on magnetic properties of Mn4N films [J].

Ching, KM ;

Chang, WD ;

Chin, TS .

APPLIED SURFACE SCIENCE, 1996, 92 :471-474

[3] ANOMALOUS PERPENDICULAR MAGNETOANISOTROPY IN MN4N FILMS ON SI(100) [J].

CHING, KM ;

CHANG, WD ;

CHIN, TS ;

DUH, JG ;

KU, HC .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (10) :6582-6584

[4] Ferrimagnetic Mn4N(111) layers grown on 6H-SiC(0001) and GaN(0001) by reactive molecular-beam epitaxy -: art. no. 112504 [J].

Dhar, S ;

Brandt, O ;

Ploog, KH .

APPLIED PHYSICS LETTERS, 2005, 86 (11) :1-3

[5] X-RAY SCATTERING FACTOR OF NITROGEN IN FE4N [J].

ELLIOTT, N .

PHYSICAL REVIEW, 1963, 129 (03) :1120-&

[6] ATOMIC SCATTERING FACTORS FOR SPHERICAL AND ASPHERICAL CHARGE DISTRIBUTIONS [J].

FREEMAN, AJ .

ACTA CRYSTALLOGRAPHICA, 1959, 12 (04) :261-271

[7] CO-CR RECORDING FILMS WITH PERPENDICULAR MAGNETIC-ANISOTROPY [J].

IWASAKI, S ;

OUCHI, K .

IEEE TRANSACTIONS ON MAGNETICS, 1978, 14 (05) :849-851

[8] ELECTRON NUMBER OF NITROGEN ATOM IN MN4N [J].

KURIYAMA, M ;

SUKEAKI, H ;

TADASU, S .

PHYSICAL REVIEW, 1963, 130 (03) :898-&

[9] Current-induced magnetization reversal in nanopillars with perpendicular anisotropy [J].

Mangin, S ;

Ravelosona, D ;

Katine, JA ;

Carey, MJ ;

Terris, BD ;

Fullerton, EE .

NATURE MATERIALS, 2006, 5 (03) :210-215

[10] MAGNETIC STUDY ON MN4N AND ITS RELATED COMPOUNDS [J].

MEKATA, M .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1962, 17 (05) :796-&

← 1 2 3 →