Gas effect on the emission and detection of the backscattered electrons in a VP-SEM at low energy

被引：1

作者：

Hafsi, Z. ^{[1
]}

Mansour, O. ^{[1
]}

Kadoun, A. ^{[1
]}

Khouchaf, L. ^{[2
]}

Mathieu, C. ^{[3
]}

机构：

[1] Djilali Liabes Univ, Lab L2MSM, Phys Dept, Fac Exact Sci, BP 89, Sidi Bel Abbes 22000, Algeria

[2] Univ Lille, IMT Lille Douai, Cite Sci Rue Guglielmo Marconi BP 20145, F-59653 Villeneuve Dascq, France

[3] Univ Artois, Univ Lille Nord France, Fac Jean Perrin, SP 18, F-62307 Lens, France

来源：

ULTRAMICROSCOPY | 2018年 / 184卷

关键词：

VP-SEM; Backscattered electrons; Skirt; Diffused fraction; X-RAY-MICROANALYSIS; SCATTERING CROSS-SECTION; VARIABLE-PRESSURE; SCINTILLATOR-PHOTOMULTIPLIER; BEAM SCATTERING; IMAGE QUALITY; HELIUM GAS; MICROSCOPE; RESOLUTION; COEFFICIENT;

D O I：

10.1016/j.ultramic.2017.08.002

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The effect of the electron beam skirting on the emission and detection of the backscattered electrons (BSE) in a low vacuum scanning electron microscope is investigated at low energy regime. Monte Carlo computed dependencies of the BSE distribution on the water vapor and air pressure shown a significant increase of the extent of the BSE exit zone. The pressure variation has however a little effect when helium gas is used. A new approach based on the comparison between the sizes of the skirt and the BSE exit zone on the specimen surface provides a useful tool to determine the operating pressure range that ensures minimal degradation of the lateral resolution in BSE imaging mode. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：17 / 23

页数：7

共 5 条

[1] Detection of Coaxial Backscattered Electrons in SEM
JIANG Chang-zhong
REN Da-zhi (Department of Physics
WuhanUniversityJournalofNaturalSciences, 2000, (01) : 41 - 44
[2] Monte Carlo simulation of electron-gas-solid interactions in silicate phases under VP-SEM
El Azzouzi, Mohamed
Achahbar, Abdelfattah
Khouchaf, Lahcen
12TH INTERNATIONAL CONFERENCE INTERDISCIPLINARITY IN ENGINEERING (INTER-ENG 2018), 2019, 32 : 916 - 920
[3] New scintillation detector of backscattered electrons for the low voltage SEM
Wandrol, Petr
JOURNAL OF MICROSCOPY-OXFORD, 2007, 227 (01): : 24 - 29
[4] Extraction of topographic and material contrasts on surfaces from SEM images obtained by energy filtering detection with low-energy primary electrons
Nagoshi, Masayasu
Aoyama, Tomohiro
Sato, Kaoru
ULTRAMICROSCOPY, 2013, 124 : 20 - 25
[5] Field-emission pumping of a ZnSe/CdSe/ZnSe nanoheterostructure with low-energy electrons through a surface potential barrier
Masalov, S. A.
Korotchenkov, A. V.
Evtikhiev, V. P.
Sorokin, S. V.
TECHNICAL PHYSICS LETTERS, 2015, 41 (01) : 50 - 53

← 1 →