Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection

被引：58

作者：

Lee, Hyunjoo J. ^{[1
]}

Park, Kwan Kyu ^{[1
]}

Kupnik, Mario ^{[2
]}

Melosh, Nicholas A.

Khuri-Yakub, Butrus T. ^{[1
]}

机构：

[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA

[2] Brandenburg Tech Univ Cottbus, D-03046 Cottbus, Germany

来源：

ANALYTICAL CHEMISTRY | 2012年 / 84卷 / 07期

关键词：

SILICA FILMS;

D O I：

10.1021/ac300225c

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 x 10(-4)% RH/Hz to water vapor in N-2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 x 10(-4)%/Hz and a volume resolution of 1.82 x 10(-4)% to CO2 in N-2.

引用

页码：3063 / 3066

页数：4

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