The BETA-MOSFET: A novel high-performance transistor

被引:0
作者
Yoh, K [1 ]
Koizumi, R [1 ]
Hashimoto, N [1 ]
Ikeda, S [1 ]
机构
[1] HITACHI LTD,SEMICOND & INTEGRATED CIRCUITS DIV,TOKYO 185,JAPAN
来源
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS | 1996年 / 79卷 / 12期
关键词
MOSFET; bipolar characteristics; tunnel gate oxide; BETA-MOSFET;
D O I
10.1002/ecjb.4420791207
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The bipolar enhanced transistor action (BETA)-MOSFET, operating in a mixture of FET mode and bipolar mode, has been fabricated. Unlike the lateral bipolar transistor, its base current can be automatically controlled by the gate voltage. Hence, the device operating voltage can be in a wide range and is a maximum of -4 V. It is confirmed that the device can be treated as a high-performance MQSFET in circuit analysis. Three types of device structures, with a gate-substrate contact that includes an ultrathin-film tunnel junction, are fabricated and evaluated. In the p-channel BETA-MOSFET, the drain current and the maximum transconductance are about four times those of the conventional MOSFET while maintaining the same threshold voltage. This result implies that the BETA-MOSFET with a gate length of 1.3 mu m exhibits a superior performance equivalent to a 0.1-mu m p-MOSFET. (C) 1997 Scripta Technica, Inc.
引用
收藏
页码:47 / 53
页数:7
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