A tapping stylus for surface topographical measurement using a quartz fork resonator

被引：0
|
作者：
Hatsuzawa, T [1 ]
机构：
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 226, Japan
来源：
PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1997年
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：41 / 44
页数：4
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