Surface modification of PDMS by atmospheric-pressure plasma-enhanced chemical vapor deposition and analysis of long-lasting surface hydrophilicity

被引:65
作者
Lee, Donghee [1 ]
Yang, Sung [1 ,2 ,3 ]
机构
[1] GIST, Grad Program Med Syst Engn, Kwangju 500712, South Korea
[2] GIST, Sch Mechatron, Kwangju 500712, South Korea
[3] GIST, Dept Nanobio Mat & Elect, Kwangju 500712, South Korea
基金
新加坡国家研究基金会;
关键词
PDMS; Surface modification; Atmospheric-pressure plasma-enhanced chemical vapor deposition; Hydrophilicity; Surface analysis; Plasma polymerization; RGP CONTACT-LENS; MICROFLUIDIC CHANNELS; HYDROPHOBIC RECOVERY; POLY(DIMETHYLSILOXANE); COATINGS; FABRICATION; FILMS; JET;
D O I
10.1016/j.snb.2011.12.017
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Atmospheric-pressure plasma-enhanced chemical vapor deposition (AP-PECVD) offers several benefits such as simplicity, high productivity, and versatility. An AP-PECVD-based method is proposed in this study to modify hydrophobic PDMS (polydimethylsiloxane) surfaces towards a long-lasting hydrophilic character. To enhance the sustainability of the hydrophilicity, two kinds of layers were sequentially deposited by AP-PECVD on the surface of a PDMS block (TEOS-O-2/CH4/PDMS). A hydrocarbon layer was first coated on the bare PDMS surface using CH4 as the reactant, and then, a hydrophilic SiOx layer was deposited using tetraethyl orthosilicate and oxygen (TEOS-O-2). The highly cross-linked hydrocarbon layer acted as a physical barrier layer (PBL) between the bare PDMS surface and the hydrophilic layer. To confirm that the PBL suppresses the hydrophobic recovery of the modified PDMS surface with double layer, a single-layer-coated PDMS sample (TEOS-O-2/PDMS) without the PBL was prepared by AP-PECVD using TEOS-O-2. The surface characteristics were determined by static contact angle measurements, surface roughness measurements, and surface chemical composition/chemical bonding determination and compared with those of modified PDMS surface with double layer. The surface morphology of TEOS-O-2/PDMS degraded seriously by the diffusion of PDMS oligomers to the hydrophilic layer, but that of TEOS-O-2/CH4/PDMS was sustained for a long time. Thus, TEOS-O-2/CH4/PDMS had the lowest contact angle, almost 0 degrees, and showed long-lasting surface hydrophilicity, with almost no change in the contact angle for 28 days. Thus, this proposed method is confirmed to be well suited for use in applications that require stable hydrophilic surface property in PDMS. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:425 / 434
页数:10
相关论文
共 41 条
[1]   Glass coating for PDMS microfluidic channels by sol-gel methods [J].
Abate, Adam R. ;
Lee, Daeyeon ;
Do, Thao ;
Holtze, Christian ;
Weitz, David A. .
LAB ON A CHIP, 2008, 8 (04) :516-518
[2]   Capillary microchannel fabrication using plasma polymerized TMDS for fluidic MEMS technology [J].
Abbas, A. ;
Supiot, P. ;
Mille, V. ;
Guillochon, D. ;
Bocquet, B. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (04)
[3]   Chemical vapor deposition enhanced by atmospheric pressure non-thermal non-equilibrium plasmas [J].
Alexandrov, SE ;
Hitchman, ML .
CHEMICAL VAPOR DEPOSITION, 2005, 11 (11-12) :457-468
[4]   Micro patterning of active proteins with perforated PDMS sheets (PDMS sheets) [J].
Atsuta, K ;
Noji, H ;
Takeuchi, S .
LAB ON A CHIP, 2004, 4 (04) :333-336
[5]   Stable modification of PDMS surface properties by plasma polymerization: Application to the formation of double emulsions in microfluidic systems [J].
Barbier, Valessa ;
Tatoulian, Michael ;
Li, Hong ;
Arefi-Khonsari, Farzaneh ;
Ajdari, Armand ;
Tabeling, Patrick .
LANGMUIR, 2006, 22 (12) :5230-5232
[6]   UV/ozone modification of poly(dimethylsiloxane) microfluidic channels [J].
Berdichevsky, Y ;
Khandurina, J ;
Guttman, A ;
Lo, YH .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 97 (2-3) :402-408
[7]   Hydrophilization and hydrophobic recovery of PDMS by oxygen plasma and chemical treatment - An SEM investigation [J].
Bodas, Dhananjay ;
Khan-Malek, Chantal .
SENSORS AND ACTUATORS B-CHEMICAL, 2007, 123 (01) :368-373
[8]   Fabrication of discontinuous surface patterns within microfluidic channels using photodefinable vapor-based polymer coatings [J].
Chen, HY ;
Lahann, J .
ANALYTICAL CHEMISTRY, 2005, 77 (21) :6909-6914
[9]   Fabrication of PDMS through-holes using the MIMIC method and the surface treatment by atmospheric-pressure CH4/He RF plasma [J].
Choi, Jongchan ;
Lee, Kyeong-Hwan ;
Yang, Sung .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (09)
[10]   Silicon oxide synthesized using an atmospheric pressure microplasma jet from a tetraethoxysilane and oxygen mixture [J].
Ding, Yi ;
Pan, Qingtao ;
Jin, Jie ;
Jia, Haijun ;
Shirai, Hajime .
THIN SOLID FILMS, 2010, 518 (13) :3487-3491