MEPHISTO spectromicroscope reaches 20 nm lateral resolution

被引：41

作者：

De Stasio, G ^{[1
]}

Perfetti, L

Gilbert, B

Fauchoux, O

Capozi, M

Perfetti, P

Margaritondo, G

Tonner, BP

机构：

[1] Ecole Polytech Fed Lausanne, Inst Phys Appl, CH-1015 Lausanne, Switzerland

[2] CNR, Ist Struttura Mat, I-00133 Rome, Italy

[3] Univ Roma Tor Vergata, Dipartimento Fis, I-00173 Rome, Italy

[4] Univ Wisconsin, Dept Phys, Milwaukee, WI 53211 USA

[5] Sincrotrone Trieste, I-34012 Trieste, Italy

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1999年 / 70卷 / 03期

关键词：

D O I：

10.1063/1.1149661

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope a Emission de PHotoelectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance. (C) 1999 American Institute of Physics. [S0034-6748(99)04902-3].

引用

页码：1740 / 1742

页数：3

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