X-Ray Imaging of Structural Defects in Si1-xGex Single Crystals Using a White Synchrotron Beam

被引：2

作者：

Argunova, T. S. ^{[1
]}

Zabrodskii, A. G. ^{[1
]}

Sorokin, L. M. ^{[1
]}

Abrosimov, N. V. ^{[2
,3
]}

Je, J. H. ^{[4
]}

机构：

[1] Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia

[2] Inst Crystal Growth, D-12489 Berlin, Germany

[3] Russian Acad Sci, Inst Solid State Phys, Chernogolovka 142432, Russia

[4] Pohang Univ Sci & Technol, Pohang 790784, South Korea

来源：

CRYSTALLOGRAPHY REPORTS | 2011年 / 56卷 / 05期

关键词：

ELECTRICAL-PROPERTIES; SIGE; RADIATION; IMAGES;

D O I：

10.1134/S1063774511050038

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Nonmonochromatic (white) synchrotron radiation with a high spatial coherence makes it possible to use different types of interaction of X-rays with matter simultaneously: diffraction, refraction, absorption, and fluorescence. In this case, the structure of materials is studied by the real-time recording of high-resolution images of different types under the same conditions. The use of X-ray images for studying the structural quality is demonstrated by the example of Czochralski-grown Si1-xGex single crystals. The effect that the germanium content has on the formation and evolution of the defect structure is analyzed and the relationship between the structure and properties is investigated. The experiments were performed on the Pohang Light Source (Pohang, Republic of Korea). DOI: 10.1134/S1063774511050038

引用

页码：811 / 818

页数：8

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