The diamond radiation detector with an Ohmic contact using diamond-like carbon interlayer

被引:1
作者
Pan, Z. [1 ]
Qin, K. [1 ]
Zhou, J. [1 ]
Yu, H. [1 ]
Xu, R. [1 ]
Huang, J. [1 ]
Tang, K. [1 ]
Wang, L. [1 ]
机构
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200041, Peoples R China
基金
中国国家自然科学基金;
关键词
Diamond; Radiation detector; Ohmic contact; Raman Spectrum; Chemical Vapor Deposition; METALLIZATION; FILM; AU;
D O I
10.1179/1432891714Z.0000000001201
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A diamond-like carbon thin layer was used as an interlayer between a free-standing diamond substrate grown by microwave plasma enhanced chemical vapour deposition and a Pt/Au layer. The dark-current of about 5.0 pA cm(-2) was found for this detector at an electric field of 200 V cm(-1). Ohmic contact was achieved by this diamond-like carbon/Pt/Au trilayer structure as evidenced by a linear dark I-V curve. The ratios of photocurrent to dark-current were about 26 and 35 for diamond detectors with Ti/Pt/Au and diamond-like carbon/Pt/Au trilayer electrodes, respectively. The energy resolution for the diamond detector with diamond-like carbon/Pt/Au electrode was about 3.30%, better than 4.56% for the detector with Ti/Pt/Au electrode.
引用
收藏
页码:828 / 831
页数:4
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