Experimental study of Multilayer Piezo-magnetic SAW delay line for Magnetic Sensor

被引：13

作者：

Elhosni, Meriem ^{[1
]}

Petit-Watelot, Sebastien ^{[1
]}

Hehn, Michel ^{[1
]}

Hage-Ali, Sami ^{[1
]}

Aissa, Keltouma Ait ^{[1
]}

Lacour, Daniel ^{[1
]}

Talbi, Abdelkrim ^{[2
]}

Elmazria, Omar ^{[1
]}

机构：

[1] Univ Lorraine, CNRS, UMR 7198, Inst Jean Lamour, Vandoeuvre Les Nancy, France

[2] PRES Univ Lille Nord France, ECLille USTL, IEMN UMR CNRS 8520, LEMAC LICS, Villeneuve Dascq, France

来源：

EUROSENSORS 2015 | 2015年 / 120卷

关键词：

SAW; Magnetic SAW sensor; ACOUSTIC-WAVE DEVICES;

D O I：

10.1016/j.proeng.2015.08.743

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This communication describes an experimental study of multilayer piezo-magnetic acoustic wave devices used as sensors of external magnetic fields applied in plane, parallel or perpendicular to the direction of the acoustic wave propagation direction. The considered device consists of a layered structure Mag/ZnO/IDT/LNY-128, Mag being the sensitive magnetoelastic layer. Two magnetoelastic films are investigated as sensitive layers: Ni and CoFeB. Their sensitivities to the magnetic field intensity and direction are measured and compared. (C) 2015 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license.

引用

页码：870 / 873

页数：4

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