Effect of Tungsten Carbidization on Gas Activation in Synthesis of Diamond Structures

被引:3
作者
Emel'yanov, A. A. [1 ]
Plotnikov, M. Yu. [1 ]
Yudin, I. B. [1 ]
机构
[1] Russian Acad Sci, Kutateladze Inst Thermophys, Siberian Branch, Novosibirsk 630090, Russia
基金
俄罗斯基础研究基金会;
关键词
JET DEPOSITION; HYDROGEN; FILAMENTS; MIXTURES; GROWTH; FILMS;
D O I
10.1134/S1063784219120065
中图分类号
O59 [应用物理学];
学科分类号
摘要
With the aim of developing a gas-jet technique for depositing diamond structures, the flow of a hydrogen-methane mixture through hot coaxial tungsten cylindrical channels with a tungsten coil inside has been investigated. Emphasis has been placed on tungsten surface carbidization during gas-jet deposition and the influence of carbidization on the deposition rate and morphology of applied coatings. Several experiments on tungsten surface carbidization under different conditions for hydrogen-methane mixture supply have been conducted. Simulation of the mixture flow by direct simulation Monte Carlo method has been performed. Possible ways of how methane and its fragments fall on the surface of the coil has been discussed.
引用
收藏
页码:1796 / 1802
页数:7
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