[1] Sandia Natl Labs, Mat Phys & Chem Sci Ctr, Albuquerque, NM 87123 USA
[2] Karlsruhe Inst Technol, Inst Appl Mat, D-76131 Karlsruhe, Germany
[3] Univ Freiburg, Dept Microsyst Engn, D-79110 Freiburg, Germany
[4] Ecole Polytech Fed Lausanne, Dept Mech Engn, CH-1015 Lausanne, Switzerland
[5] Univ Freiburg, Freiburg Mat Res Ctr, D-79104 Freiburg, Germany
[6] Univ Freiburg, Cluster Excellence LivMatS, D-79110 Freiburg, Germany