共 17 条
- [5] Hosaka H., 1994, Proceedings IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (Cat. No.94CH3404-1), P193, DOI 10.1109/MEMSYS.1994.555622
- [10] NAKANO K, 2002, INT WORKSH POW MEMS, P114