Band offsets between amorphous LaAlO3 and In0.53Ga0.47As

被引:13
作者
Goel, N. [1 ]
Tsai, W.
Garner, C. M.
Sun, Y.
Pianetta, P.
Warusawithana, M.
Schlom, D. G.
Wen, H.
Gaspe, C.
Keay, J. C.
Santos, M. B.
Goncharova, L. V.
Garfunkel, E.
Gustafsson, T.
机构
[1] Intel Corp, Santa Clara, CA 95052 USA
[2] Stanford Univ, Stanford Synchrotron Radiat Lab, Stanford, CA 94305 USA
[3] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
[4] Univ Oklahoma, Homer L Dodge Dept Phys & Astron, Norman, OK 73019 USA
[5] Rutgers State Univ, Surface Modificat Lab, Piscataway, NJ 08854 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2783264
中图分类号
O59 [应用物理学];
学科分类号
摘要
The band offsets between an amorphous LaAlO3 dielectric prepared by molecular-beam deposition and a n-type In0.53Ga0.47As (001) layer have been measured using synchrotron radiation photoemission spectroscopy. The valence and conduction band offsets at the postdeposition annealed LaAlO3/InGaAs interface are 3.1 +/- 0.1 and 2.35 +/- 0.2 eV, respectively. The band gap of LaAlO3, as determined by Al 2p and O 1s core level energy loss spectra, is 6.2 +/- 0.1 eV. Within the resolution of the medium energy ion scattering technique, no interfacial oxide layer is seen between the InGaAs and the 3.6 nm thick amorphous LaAlO3.
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页数:3
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