Phase-shifting diffraction grating interferometer for testing concave mirrors

被引:2
作者
Hwang, TJ [1 ]
Kim, SW [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Engn Mech, Taejon 305701, South Korea
来源
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III | 2003年 / 5144卷
关键词
optical figure metrology; diffraction grating; phase-shifting; optical fiber confocal microscopy;
D O I
10.1117/12.500194
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present a novel concept of phase-shifting diffraction-grating interferometer, which is intended for the optical testing of concave mirrors with high precision. The interferometer is configured with a single reflective diffraction grating, which performs manifold functions of beam splitting, beam recombination, and phase shifting. The reference and test wave fronts are generated by means of reflective diffraction at the focal plane of a microscope objective with large numerical aperture, which allows testing fast mirrors with low f-numbers. The fiber-optic confocal design is adopted for the microscope objective to focus a converging beam on the diffractive grating, which greatly reduces the alignment error between the focusing optics and the diffraction grating. Translating the grating provides phase shifting, which enables to measure the figure errors of the test mirror to nanometer accuracy.
引用
收藏
页码:451 / 459
页数:9
相关论文
共 13 条
[1]   OBLIQUE-INCIDENCE INTERFEROMETRY APPLIED TO NON-OPTICAL SURFACES [J].
BIRCH, KG .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (10) :1045-1048
[2]   FIBEROPTIC CONFOCAL MICROSCOPE - FOCON [J].
DABBS, T ;
GLASS, M .
APPLIED OPTICS, 1992, 31 (16) :3030-3035
[3]  
Daniel M., 2006, Optical Shop Testing
[4]   Grating interferometer for flatness testing [J].
deGroot, PJ .
OPTICS LETTERS, 1996, 21 (03) :228-230
[5]   REFLECTIVE GRATING INTERFEROMETER FOR MEASURING THE REFRACTIVE-INDEX OF TRANSPARENT MATERIALS [J].
DENICOLA, S ;
FERRARO, P ;
FINIZIO, A ;
PESCE, G ;
PIERATTINI, G .
OPTICS COMMUNICATIONS, 1995, 118 (5-6) :491-494
[6]   MULTICHANNEL PHASE-SHIFTED INTERFEROMETER [J].
KWON, OY .
OPTICS LETTERS, 1984, 9 (02) :59-61
[7]   Phase-shifting point diffraction interferometer [J].
Medecki, H ;
Tejnil, E ;
Goldberg, KA ;
Bokor, J .
OPTICS LETTERS, 1996, 21 (19) :1526-1528
[8]   LASER UNEQUAL PATH INTERFEROMETER CONFIGURATIONS BY GRATING SPLITTING AT THE FOURIER PLANE [J].
MOLESINI, G ;
PEDRINI, G ;
QUERCIOLI, F .
OPTICAL ENGINEERING, 1984, 23 (05) :646-649
[9]   A SIMPLE LASER INTERFEROMETER [J].
MUNNERLYN, CR .
APPLIED OPTICS, 1969, 8 (04) :827-+
[10]   40 YEARS OF HISTORY OF GRATING INTERFEROMETER [J].
RONCHI, V .
APPLIED OPTICS, 1964, 3 (04) :437-&