Dielectric and microstructural properties of barium titanate zirconate thin films on copper substrates

被引:35
作者
Ihlefeld, JF
Maria, JP
Borland, W
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] DuPont Elect Technol, Res Triangle Pk, NC 27709 USA
关键词
D O I
10.1557/JMR.2005.0342
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Barium titanate zirconate, Ba(Ti1-xZrx)O-3 (0 <= x <= 0.25), thin films were deposited via the chemical solution deposition (CSD) method directly on copper foils. The films were processed in a reductive atmosphere containing nitrogen, water vapor, and hydrogen gas at 900 degrees C to preserve the metallic copper substrate during crystallization. Increasing the fraction of BaZrO3 revealed several effects, including an increase in unit cell dimensions, a decrease in both the temperature and value of the maximum permittivity, as well as a decrease in the average grain size of the films. The decrease in the relative permittivity was attributed to a grain size effect as opposed to zirconium substitution. In film compositions containing 25 mol% BaZrO3, the permittivity below T-max, became dispersive, and the ferroelectric transitions became increasingly diffuse. These characteristics suggest relaxor-like behavior. The dielectric tunability of Ba(Ti1-xZrx)O-3 was studied at room temperature and at T-max for each composition. There was little variation in the tunability with measurement temperature; however compositions that were ferroelectric at room temperature saw a decrease in hysteresis at T-max, and all compositions showed an increase in permittivity.
引用
收藏
页码:2838 / 2844
页数:7
相关论文
共 31 条
[1]  
[Anonymous], 1998, INT CTR DIFFRACTION
[2]   DIELECTRIC-PROPERTIES OF FINE-GRAINED BARIUM-TITANATE CERAMICS [J].
ARLT, G ;
HENNINGS, D ;
DEWITH, G .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) :1619-1625
[3]  
CROSS LE, 1994, FERROELECTRICS, V151, P302
[4]  
CULLITY BD, 2001, ELEMENT XRAY DIFFRAC, P366
[5]   Chemical solution deposition of &lt;100&gt;-oriented SrTiO3 buffer layers on Ni substrates [J].
Dawley, JT ;
Ong, RJ ;
Clem, PG .
JOURNAL OF MATERIALS RESEARCH, 2002, 17 (07) :1678-1685
[6]   Phase transition studies of sol-gel deposited barium zirconate titanate thin films [J].
Dixit, A ;
Majumder, SB ;
Dobal, PS ;
Katiyar, RS ;
Bhalla, AS .
THIN SOLID FILMS, 2004, 447 :284-288
[7]   The role of interfaces on an apparent grain size effect on the dielectric properties for ferroelectric barium titanate ceramics [J].
Frey, MH ;
Xu, Z ;
Han, P ;
Payne, DA .
FERROELECTRICS, 1998, 206 (1-4) :337-353
[8]  
Hofer C, 2002, FERROELECTRICS, V270, P1365, DOI 10.1080/00150190211242
[9]   Copper compatible barium titanate thin films for embedded passives [J].
Ihlefeld, J ;
Laughlin, B ;
Hunt-Lowery, A ;
Borland, W ;
Kingon, A ;
Maria, JP .
JOURNAL OF ELECTROCERAMICS, 2005, 14 (02) :95-102
[10]  
Jonker G. H., 1955, PHILIPS TECH REV, V17, P129