Dielectric and microstructural properties of barium titanate zirconate thin films on copper substrates

被引:35
作者
Ihlefeld, JF
Maria, JP
Borland, W
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] DuPont Elect Technol, Res Triangle Pk, NC 27709 USA
关键词
D O I
10.1557/JMR.2005.0342
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Barium titanate zirconate, Ba(Ti1-xZrx)O-3 (0 <= x <= 0.25), thin films were deposited via the chemical solution deposition (CSD) method directly on copper foils. The films were processed in a reductive atmosphere containing nitrogen, water vapor, and hydrogen gas at 900 degrees C to preserve the metallic copper substrate during crystallization. Increasing the fraction of BaZrO3 revealed several effects, including an increase in unit cell dimensions, a decrease in both the temperature and value of the maximum permittivity, as well as a decrease in the average grain size of the films. The decrease in the relative permittivity was attributed to a grain size effect as opposed to zirconium substitution. In film compositions containing 25 mol% BaZrO3, the permittivity below T-max, became dispersive, and the ferroelectric transitions became increasingly diffuse. These characteristics suggest relaxor-like behavior. The dielectric tunability of Ba(Ti1-xZrx)O-3 was studied at room temperature and at T-max for each composition. There was little variation in the tunability with measurement temperature; however compositions that were ferroelectric at room temperature saw a decrease in hysteresis at T-max, and all compositions showed an increase in permittivity.
引用
收藏
页码:2838 / 2844
页数:7
相关论文
共 31 条
  • [1] [Anonymous], 1998, INT CTR DIFFRACTION
  • [2] DIELECTRIC-PROPERTIES OF FINE-GRAINED BARIUM-TITANATE CERAMICS
    ARLT, G
    HENNINGS, D
    DEWITH, G
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) : 1619 - 1625
  • [3] CROSS LE, 1994, FERROELECTRICS, V151, P302
  • [4] CULLITY BD, 2001, ELEMENT XRAY DIFFRAC, P366
  • [5] Chemical solution deposition of &lt;100&gt;-oriented SrTiO3 buffer layers on Ni substrates
    Dawley, JT
    Ong, RJ
    Clem, PG
    [J]. JOURNAL OF MATERIALS RESEARCH, 2002, 17 (07) : 1678 - 1685
  • [6] Phase transition studies of sol-gel deposited barium zirconate titanate thin films
    Dixit, A
    Majumder, SB
    Dobal, PS
    Katiyar, RS
    Bhalla, AS
    [J]. THIN SOLID FILMS, 2004, 447 : 284 - 288
  • [7] The role of interfaces on an apparent grain size effect on the dielectric properties for ferroelectric barium titanate ceramics
    Frey, MH
    Xu, Z
    Han, P
    Payne, DA
    [J]. FERROELECTRICS, 1998, 206 (1-4) : 337 - 353
  • [8] Hofer C, 2002, FERROELECTRICS, V270, P1365, DOI 10.1080/00150190211242
  • [9] Copper compatible barium titanate thin films for embedded passives
    Ihlefeld, J
    Laughlin, B
    Hunt-Lowery, A
    Borland, W
    Kingon, A
    Maria, JP
    [J]. JOURNAL OF ELECTROCERAMICS, 2005, 14 (02) : 95 - 102
  • [10] Jonker G. H., 1955, PHILIPS TECH REV, V17, P129