Strontium titanate films prepared by spray pyrolysis

被引:12
作者
Brankovic, G
Brankovic, Z
Varela, JA
Longo, E
机构
[1] UNESP, Inst Quim, BR-14801970 Araraquara, SP, Brazil
[2] Univ Fed Sao Carlos, Dept Quim, BR-13565905 Sao Carlos, SP, Brazil
[3] Univ Belgrade, Fac Technol & Met, YU-11000 Belgrade, Serbia
[4] Univ Belgrade, Ctr Multidisciplinary Studies, YU-11030 Belgrade, Serbia
基金
巴西圣保罗研究基金会;
关键词
films; sol-gel processes; strontium titanate;
D O I
10.1016/S0955-2219(03)00459-X
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Strontium titanate thin films were prepared by spray pyrolysis technique. Deposition parameters, such as solution concentration, time and temperature of deposition, and flow rate of carrier gas were optimized to obtain dense films without cracks. Films with different thicknesses were prepared through the control of deposition time. Prepared thin films were homogeneous, well crystallized, with uniform grain size. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码:989 / 991
页数:3
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