Infrared reflectivity determination of alloy composition in AlxGa1-xAs and InxGa1-xAs structures

被引：3

作者：

Engelbrecht, JAA ^{[1
]}

Botha, JR ^{[1
]}

机构：

[1] UNIV WESTERN CAPE,DEPT PHYS,ZA-7535 BELLVILLE,SOUTH AFRICA

来源：

APPLIED SPECTROSCOPY | 1997年 / 51卷 / 03期

关键词：

infrared reflectance; AlxGa1-xAs; InxGa1-xAs; alloy composition;

D O I：

10.1366/0003702971940332

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Fourier transform infrared reflectance spectroscopy can be used to establish the height of the transverse optic mode peak of AlAs at 361 cm(-1). The peak height is found to be linearly dependent on the aluminum content in AlxGa1-xAs layers on GaAs substrates. Previously published spectra for InxGa1-xAs yielded a similar result for the In content, from the transverse optic mode peak of InAs at 220 cm(-1). A quick and nondestructive technique is proposed for the determination of the aluminum and indium mole fraction in these structures.

引用

页码：433 / 437

页数：5

共 4 条

[1] Comprehensive analysis of the composition determination in epitaxial AlxGa1-xAs films: A multitechnique approach
Gonzalez, M.
Rozas, G.
Salazar Alarcon, L.
Simonetto, M.
Bruchhausen, A.
Zampieri, G.
Baruj, A.
Prado, F.
Pastoriza, H.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 123
[2] Optical properties study of InxGa1-xAs/GaAs structures using spectral reflectance, photoreflectance and near-infrared photoluminescence
Habchi, M. M.
Bedoui, M.
Tounsi, N.
Zaied, I.
Rebey, A.
El Jani, B.
SUPERLATTICES AND MICROSTRUCTURES, 2014, 73 : 71 - 81
[3] Probing semiconductor band structures and heterojunction interface properties with ballistic carrier emission: GaAs/AlxGa1-xAs as a model system
Yi, Wei
Narayanamurti, Venkatesh
Lu, Hong
Scarpulla, Michael A.
Gossard, Arthur C.
PHYSICAL REVIEW B, 2010, 81 (23):
[4] Thermodynamic analysis of InxGa1-xN alloy composition grown by metalorganic vapor phase epitaxy
Koukitu, A
Takahashi, N
Taki, T
Seki, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (6A): : L673 - L675

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