Cutting of Diamond Substrate Using Fixed Diamond Grain Saw Wire

被引:2
作者
Kamiya, Osamu [1 ]
Takahashi, Mamoru [1 ]
Miyano, Yasuyuki [1 ]
Ito, Shinichi [1 ]
Nakatsu, Masanobu [2 ]
Mizuma, Hiroyuki [2 ]
Iwama, Yuichi [2 ]
Murata, Kenji [3 ]
Nanao, Junpei [3 ]
Kawano, Makoto [3 ]
Maisawa, Arata [3 ]
Kazumi, Takashi [3 ]
机构
[1] Akita Univ, Fac Engn Sci, Dept Syst Design Engn, Akita 0108502, Japan
[2] SANWA TEKKI Corp, Shinagawa Ku, 6-4-6 Minami Shinagawa, Tokyo 1408669, Japan
[3] Nippon Koki Co Ltd, Res & Dev Dept, Shirakawa 9618686, Japan
关键词
diamond cutting; diamond saw wire; fixed grain saw wire; diamond grain; cutting length;
D O I
10.3390/ma15165524
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This study demonstrates that a single-crystal diamond substrate can be cut along designed lines using the diamond-saw-wire cutting method. We developed an original saw-wire fixed diamond-grain using a bronze solder with a high melting temperature. We created a unique product machine system with a high vacuum furnace and a bronze solder that contains a metallic compound. The diamond cutting mechanism employed in this study is based on the mild wear phenomenon, owing to the friction between the diamond surfaces. A linear relationship between the cutting length and wire feed distance was observed. The relationship can be approximated as y = 0.3622x, where y (mu m) is the cutting depth and x (km) is the wire feed distance. The life of the saw-wire was longer than that of the 6000 km wire feed distance and was tested by reciprocating an 8-m short wire at a speed, tension, and cutting force of 150 m/min, 1 N, and 0.2 N, respectively. A single crystal diamond substrate could be cut along the designed line, which was more than 2 mm long. The cutting speed was maintained constant at 0.36 mu m/km.
引用
收藏
页数:11
相关论文
共 26 条
  • [1] Adamant Namiki Precision Jewel Co. Ltd., HIGH QUALITY LARGE D
  • [2] Caspi A., 1997, GEMS GEMOL, V33, P102, DOI DOI 10.5741/GEMS.33.2.102
  • [3] Distribution of diamond grains in fixed abrasive wire sawing process
    Chung, Chunhui
    Tsay, Gow Dong
    Tsai, Meng-Hsiu
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2014, 73 (9-12) : 1485 - 1494
  • [4] EON Research, DIAMOND SEMICONDUCTO
  • [5] Gemconcepts Ltd, DIAMOND CUTTING THE
  • [6] Femtosecond Laser Micro/Nano-manufacturing: Theories, Measurements, Methods, and Applications
    Guo B.
    Sun J.
    Hua Y.
    Zhan N.
    Jia J.
    Chu K.
    [J]. Nanomanufacturing and Metrology, 2020, 3 (01) : 26 - 67
  • [7] Fixed abrasive diamond wire saw slicing of single-crystal silicon carbide wafers
    Hardin, CW
    Qu, J
    Shih, AJ
    [J]. MATERIALS AND MANUFACTURING PROCESSES, 2004, 19 (02) : 355 - 367
  • [8] Hase A., 2016, TRIBOL ONLINE, V11, P114, DOI [10.2474/trol.11.114, DOI 10.2474/TROL.11.114]
  • [9] Ishikawa T., 1997, T JPN SOC MECH ENG A, V63, P1791, DOI [10.1299/kikaia.63.1791, DOI 10.1299/KIKAIA.63.1791]
  • [10] Ishikawa T., 1997, T JPN SOC MECH ENG A, V63, P2694, DOI [10.1299/kikaia.63.2694, DOI 10.1299/KIKAIA.63.2694]