Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

被引：3
作者：
Li, Xiaojie [1 ]
Duan, Xiaojie [1 ]
Li, Guangxu [1 ]
Cao, Teng [1 ]
Xie, Rui [1 ]
Hong, Yanhua [2 ]
Tang, Chunxiao [1 ]
Li, Enbang [3 ]
Zhang, Cheng [1 ]
Li, Hongqiang [1 ]
机构：
[1] Tianjin Polytech Univ, Sch Elect & Informat Engn, Tianjin Key Lab Optoelect Detect Technol & Syst, Tianjin, Peoples R China
[2] Bangor Univ, Sch Elect Engn, Bangor, Gwynedd, Wales
[3] Univ Wollongong, Sch Phys, Wollongong, NSW, Australia
来源：
OPTICAL ENGINEERING | 2018年 / 57卷 / 09期
基金：
中国国家自然科学基金;
关键词：
fiber-optic interference; three-dimensional shape; small object; PHASE-MODULATING INTERFEROMETRY; MEASURING PROFILOMETRY; SHAPE MEASUREMENT; SYSTEM;
D O I：
10.1117/1.OE.57.9.094105
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We used a system that exploits the Mach-Zehnder interferometer structure and Young's double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision. Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 x 10-cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数：9
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