共 50 条
- [3] STUDY OF THE GAS-PHASE PARAMETERS AFFECTING THE SILICON-OXIDE FILM DEPOSITION INDUCED BY AN ARF LASER APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 57 (02): : 181 - 185
- [7] CHEMICAL GAS-PHASE DEPOSITION OF ALUMINUM-OXIDE FROM ALCOHOL-CHLORIDE MIXTURES ZHURNAL NEORGANICHESKOI KHIMII, 1990, 35 (10): : 2488 - 2491
- [10] THE ROLE OF SILANE GAS-PHASE CHEMISTRY IN SILICON FILM DEPOSITION AND PARTICLE NUCLEATION ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1986, 192 : 158 - COLL