Three-degree-of-freedom optic mount for extreme ultraviolet lithography

被引：0
|
作者：
Tajbakhsh, H [1 ]
Hale, L [1 ]
Malsbury, T [1 ]
Jensen, S [1 ]
Parker, J [1 ]
机构：
[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94550 USA
来源：
PROCEEDINGS OF THE THIRTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1998年
关键词：
precision stage; flexure; kinematic design; parallel link manipulator; error budget; thermal stability; EUVL;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A mechanism to finely align optics for extreme ultraviolet lithography applications is presented. The mechanism is a small motion parallel link manipulator with flexure joints that exhibits nanometer level positioning capability. Performance results of a prototype system are given in this paper.
引用
收藏
页码：359 / 362
页数：4
相关论文
共 50 条
  • [1] A three-degree-of-freedom anthropomorphic oculomotor simulator
    School of Mechanical and Aerospace Engineering, Seoul National University, San 56-1, Sillim-dong, Gwanak-gu, Seoul 151-742, Korea, Republic of
    不详
    不详
    不详
    Int. J. Control Autom. Syst., 2006, 2 (227-235):
  • [2] A new three-degree-of-freedom parallel manipulator
    Liu, XJ
    Kim, J
    2002 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS I-IV, PROCEEDINGS, 2002, : 1155 - 1160
  • [3] Development of a three-degree-of-freedom piezoelectric actuator
    Wei, Fenglong
    Wang, Xueliang
    Dong, Jingshi
    Guo, Kang
    Sui, Yongxin
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (02):
  • [4] A three-degree-of-freedom anthropomorphic oculomotor simulator
    Bang, YB
    Paik, JK
    Shin, BH
    Lee, C
    INTERNATIONAL JOURNAL OF CONTROL AUTOMATION AND SYSTEMS, 2006, 4 (02) : 227 - 235
  • [5] ON THE CONTROL OF THREE-DEGREE-OF-FREEDOM WAVE ENERGY CONVERTERS
    Zou, Shangyan
    Abdelkhalik, Ossama
    PROCEEDINGS OF THE ASME 11TH INTERNATIONAL CONFERENCE ON ENERGY SUSTAINABILITY, 2017, 2017,
  • [6] Dynamic characteristics of three-degree-of-freedom resonant actuator
    Kato, Masayuki
    Hirata, Katsuhiro
    Fujita, Kensuke
    COMPEL-THE INTERNATIONAL JOURNAL FOR COMPUTATION AND MATHEMATICS IN ELECTRICAL AND ELECTRONIC ENGINEERING, 2018, 37 (05) : 1566 - 1574
  • [7] Control of a Three-Degree-of-Freedom Variable Inertia Generator
    Verret, Samuel
    Laliberte, Thierry
    Gosselin, Clement
    IFAC PAPERSONLINE, 2022, 55 (38): : 73 - 79
  • [8] DYNAMIC　MODEL　OF　A　THREE-DEGREE-OF-FREEDOM　PARALLEL　ROBOT
    Chinese Journal of Mechanical Engineering, 1997, (01) : 13 - 18
  • [9] Multistability of a three-degree-of-freedom vibro-impact system
    Zhang, Yongxiang
    Luo, Guanwei
    COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION, 2018, 57 : 331 - 341
  • [10] Kinematics and dynamics analysis of a three-degree-of-freedom parallel manipulator
    Shan-zeng Liu
    Zhen-cai Zhu
    Zhao-peng Sun
    Guo-hua Cao
    Journal of Central South University, 2014, 21 : 2660 - 2666
12345