In-situ and ex-situ examination of the early stages of chemical vapor deposition

被引：0
|
作者：
Stock, HR
Jarms, C
Berndt, H
Wielage, B
Hofmann, A
机构：
[1] Stiftung Inst Werkstofftech, D-28359 Bremen, Germany
[2] TU Chemnitz Zwickau, Lehrstuhl Verbundwerkstoffe, D-09107 Chemnitz, Germany
来源：
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1998年 / 361卷 / 6-7期
关键词：
D O I：
10.1007/s002160050978
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A cold working steel was coated both with high temperature CVD (TiN) and moderate temperature CVD (Ti[C,N]). AES depth profiles show a significant difference at the interface, where a thin oxide layer remains detectable at deposition temperatures of 750 degrees C. It could be shown that an impedance signal at a frequency of 13 MHz is well suited to detect the early stages of the growth of a CVD coating.
引用
收藏
页码：645 / 646
页数：2
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