III-Nitride Microsensors for 360° Angle Detection

被引：12
作者：
Yin, Jiahao [1 ]
Yang, Hongying [1 ]
Luo, Yumeng [1 ]
Wang, Qing [1 ,2 ,3 ]
Yu, Hongyu [1 ,2 ,3 ]
Li, Kwai Hei [1 ,2 ,3 ]
机构：
[1] Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
[2] Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Com, Minist Educ, Shenzhen 518055, Peoples R China
[3] Southern Univ Sci & Technol, Engn Res Ctr Three Dimens Integrat Guangdong Prov, Shenzhen 518055, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2022年 / 43卷 / 03期
基金：
中国国家自然科学基金;
关键词：
Photoconductivity; Microsensors; Light emitting diodes; Ethanol; Containers; Current measurement; Time factors; GaN; full-angle detection; optoelectronic integration; microsensor; TILT SENSOR; INCLINOMETER;
D O I：
10.1109/LED.2022.3148232
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The fabrication of a miniature III-nitride angle sensor is demonstrated. A monolithic device composed of a light emitter and four detectors is fabricated on a GaN-on-sapphire wafer. By integrating the device with a glass cylindrical container partially filled with ethanol as a liquid pendulum, the on-chip detectors can effectively sense the change of internally reflected light with angle rotation, and produce the photocurrent signals to indicate the angle level. Verified by a series of experimental measurements, the millimeter-sized sensor exhibits full-angle detection capability, sub-second response time, and high repeatability, which makes it well suited for broad practical applications in angle sensing.
引用
收藏
页码：458 / 461
页数：4
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